Towards the realisation of a pressure sensor incorporating integrated optic waveguides

Author

Nayyar, A. Taneja ; Bonar, J.R. ; Bebbington, J.A. ; De La Rue, R.M. ; Uttamchandani, D.

Author_Institution

Dept. Electron. & Electr. Eng., Glasgow Univ., UK

fYear

1994

fDate

34382

Firstpage

42675

Lastpage

42678

Abstract

The authors report on the steps they have completed towards the development of a miniature pressure sensor incorporating single mode integrated optic waveguides. In this sensor, a Mach-Zehnder interferometer is fabricated on one side of the diaphragm. The pressure induced deflection of the diaphragm results in the differential phase modulation of light guided in the two arms of the interferometer. Interference between the lightwaves in the two arms produces the usual output intensity variation characteristic of two-beam interferometers. In the work described the authors use an alternative waveguide fabrication technology-flame hydrolysis-to fabricate low loss waveguides on the silicon diaphragm

Keywords

chemical vapour deposition; diaphragms; integrated optics; light interferometers; optical sensors; optical waveguides; optical workshop techniques; pressure sensors; CVD; Mach-Zehnder interferometer; Si diaphragm; differential phase modulation; elemental semiconductor; flame hydrolysis; integrated optic waveguides; low loss waveguides; miniature; pressure induced deflection; pressure sensor; single mode;

fLanguage

English

Publisher

iet

Conference_Titel

Microengineering and Optics, IEE Colloquium on

Conference_Location

London

Type

conf

Filename

286135