Title :
Linearized Gimbal-less Two-Axis MEMS Mirrors
Author :
Milanovic, Veljko
Author_Institution :
Mirrorcle Technol., Inc., Albany, CA
Abstract :
Gimbal-less two-axis scanning MEMS mirrors provide ultra low-power and fast optical beam scanning at angles of up to 32deg in both axes, while dissipating less than 1 mW of power. Linearized driving scheme and 4-quadrant addressable electrostatic comb drive design gives nearly linear voltage-angle characteristics. Devices are made entirely of single-crystal silicon, resulting in excellent repeatability and reliability. Mirrors from 1 mm to 4 mm allow users to optimize in their application.
Keywords :
electrostatic devices; micro-optomechanical devices; micromirrors; silicon; MEMS mirrors; Si; electrostatic comb drive design; linearized driving; optical beam scanning; reliability; repeatability; single-crystal silicon; Actuators; Bonding; Electrostatics; Fingers; High speed optical techniques; Micromechanical devices; Mirrors; Optical beams; Silicon; Voltage; 130.3990 Micro-optical devices; 230.4040 Mirrors;
Conference_Titel :
Optical Fiber Communication - incudes post deadline papers, 2009. OFC 2009. Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4244-2606-5
Electronic_ISBN :
978-1-55752-865-0
