Title :
IEE Colloquium on `Microengineering and Optics´ (Digest No.1994/043)
Abstract :
The following topics were dealt with: excimer lasers for micromachining; microengineering for optical devices; quantum dots for optoelectronics; photo-sculpting technology for complex surfaces fabrication; planarisation of SLM backplanes; fabrication of fibre arrays; diffractive microlenses and coupling; hybrid integration using optical motherboards; micropackaging for optoelectronic components; microfabrication of polymer waveguide mould masters; optical sensors fabrication
Keywords :
integrated optoelectronics; laser beam machining; nanotechnology; optical elements; optical fibre fabrication; optical sensors; optical workshop techniques; packaging; SLM backplanes; complex surfaces fabrication; coupling; diffractive microlenses; excimer lasers; fibre arrays; hybrid integration; microengineering; microfabrication; micromachining; micropackaging; optical devices; optical motherboards; optical sensors; optoelectronic components; photo-sculpting technology; planarisation; polymer waveguide mould masters; quantum dots;
Conference_Titel :
Microengineering and Optics, IEE Colloquium on
Conference_Location :
London
