DocumentCode
1815702
Title
Waveguide optical isolators fabricated by direct bonding
Author
Mizumoto, Tetsuya ; Shoji, Yuya ; Takei, Ryouhei
Author_Institution
Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo
fYear
2008
fDate
25-29 May 2008
Firstpage
1
Lastpage
4
Abstract
The surface activated direct bonding is an effective technique to integrate dissimilar crystals like magneto-optic garnets and semiconductors. We apply this technique to fabricate waveguide optical isolators composed of III-V semiconductors as well as Si guiding layers.
Keywords
III-V semiconductors; bonding processes; elemental semiconductors; garnets; optical isolators; optical waveguides; silicon; III-V semiconductors; Si guiding layers; magneto-optic garnets; surface activated direct bonding; waveguide optical isolator; Garnets; Integrated optics; Isolators; Magnetooptic effects; Optical interferometry; Optical surface waves; Optical waveguides; Semiconductor waveguides; Surface treatment; Wafer bonding; direct bonding; magneto-optic garnet; optial isolator; photonic integrated circuit;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 2008. IPRM 2008. 20th International Conference on
Conference_Location
Versailles
ISSN
1092-8669
Print_ISBN
978-1-4244-2258-6
Electronic_ISBN
1092-8669
Type
conf
DOI
10.1109/ICIPRM.2008.4703052
Filename
4703052
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