Title :
Waveguide optical isolators fabricated by direct bonding
Author :
Mizumoto, Tetsuya ; Shoji, Yuya ; Takei, Ryouhei
Author_Institution :
Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo
Abstract :
The surface activated direct bonding is an effective technique to integrate dissimilar crystals like magneto-optic garnets and semiconductors. We apply this technique to fabricate waveguide optical isolators composed of III-V semiconductors as well as Si guiding layers.
Keywords :
III-V semiconductors; bonding processes; elemental semiconductors; garnets; optical isolators; optical waveguides; silicon; III-V semiconductors; Si guiding layers; magneto-optic garnets; surface activated direct bonding; waveguide optical isolator; Garnets; Integrated optics; Isolators; Magnetooptic effects; Optical interferometry; Optical surface waves; Optical waveguides; Semiconductor waveguides; Surface treatment; Wafer bonding; direct bonding; magneto-optic garnet; optial isolator; photonic integrated circuit;
Conference_Titel :
Indium Phosphide and Related Materials, 2008. IPRM 2008. 20th International Conference on
Conference_Location :
Versailles
Print_ISBN :
978-1-4244-2258-6
Electronic_ISBN :
1092-8669
DOI :
10.1109/ICIPRM.2008.4703052
