Title :
Polymer Coated Capacitive Microintegrated Gas Sensor
Author :
Steiner, F.-P. ; Hierlemann, Andreas ; Cornila, C. ; Noetzel, G. ; Bächtold, M. ; Korvink, J.G. ; Göpel, W. ; Baltes, H.
Author_Institution :
Physical Electronics Laboratory, ETH Zurich
Keywords :
Capacitance; Capacitive sensors; Chemical sensors; Chemical technology; Dielectrics; Electrodes; Gas detectors; Pollution measurement; Polymer films; Supercapacitors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721963
