Title :
A Humidity Sensor Operating At Very Low Temperature
Author :
Murria, R. ; Pintoa, N. ; Ercolia, C.
Keywords :
Dielectric substrates; Dielectric thin films; Electric variables measurement; Electrodes; Gold; Humidity; Physics; Sensor phenomena and characterization; Sputtering; Temperature sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721967