DocumentCode
1816747
Title
A Humidity Sensor Operating At Very Low Temperature
Author
Murria, R. ; Pintoa, N. ; Ercolia, C.
Volume
2
fYear
1995
fDate
25-29 June 1995
Firstpage
829
Lastpage
832
Keywords
Dielectric substrates; Dielectric thin films; Electric variables measurement; Electrodes; Gold; Humidity; Physics; Sensor phenomena and characterization; Sputtering; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721967
Filename
721967
Link To Document