Title :
EC recycling technology for chemical reduction and energy saving in semiconductor or FPD fabrications
Author :
Moon, Seho ; Gweon, Minhyeon ; Kim, Byeongho ; Kim, Hogil ; Chai, Sanghoon
Author_Institution :
Dept. of Electron. Eng., Hoseo Univ., Asan, South Korea
Abstract :
We have developed ethylene carbonate recycling process and system for chemical reduction and energy saving on photo-resist stripping and cleaning process, which will be a core process technology to get high performance and low price in semiconductor or FPD fabrications. Using this novel technology it is possible for the semiconductor wafer and FPD planer to process with low cost, and also there will be improvement of environmental pollution.
Keywords :
carbon compounds; cleaning; pollution; recycling; semiconductor device manufacture; FPD fabrications; FPD planer; chemical reduction; cleaning process; core process technology; energy saving; environmental pollution; ethylene carbonate recycling process; ethylene carbonate recycling system; photo-resist stripping; semiconductor wafer; Pollution; Solids;
Conference_Titel :
Advances in Energy Engineering (ICAEE), 2010 International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-7831-6
DOI :
10.1109/ICAEE.2010.5557624
