DocumentCode :
1817945
Title :
Session Mb 1 MEMS / BIO MEMS technology & applications 1
Volume :
1
fYear :
2008
fDate :
13-15 Oct. 2008
Firstpage :
141
Lastpage :
141
Abstract :
Start of the above-titled section of the conference proceedings record.
Keywords :
Micromechanical devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Conference, 2008. CAS 2008. International
Conference_Location :
Sinaia
ISSN :
1545-827X
Print_ISBN :
978-1-4244-2004-9
Type :
conf
DOI :
10.1109/SMICND.2008.4703350
Filename :
4703350
Link To Document :
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