Measurement of Defects in Spin Coated Polyimide Films

Author

Rubehn, B. ; Stieglitz, T.

Author_Institution

Univ. of Freiburg, Freiburg

fYear

2007

fDate

22-26 Aug. 2007

Firstpage

183

Lastpage

185

Abstract

Polyimide is a material often used in thin film neural microelectrodes. In this work, we processed thin films from three different polyimide precursors, Pyralin PI2611, Durimide 7510 and U-Varnish S, and tested them with respect to their defect density. We regard defects as areas of any size where the insulation of the thin film is damaged. All three materials were measured with a defect density less than 0.2 cm^-2. To obtain a defect free polyimide layer it is crucial to process the precursor in a particle free environment.

Keywords

density; insulating thin films; microelectrodes; noncrystalline defects; polymer films; spin coating; Durimide 7510; Pyralin PI2611; U-Varnish S; defect density; defects; spin coated polyimide thin films; thin film insulation; thin film neural microelectrodes; Biological materials; Biomedical measurements; Curing; Electrochemical processes; Gold; Insulation; Polyimides; Substrates; Transistors; Voltage; MEMS; Polyimide; microimplant; neural prostheses; pinhole; Coated Materials, Biocompatible; Materials Testing; Microelectrodes; Resins, Synthetic;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology Society, 2007. EMBS 2007. 29th Annual International Conference of the IEEE

Conference_Location

Lyon

ISSN

1557-170X

Print_ISBN

978-1-4244-0787-3

Type

conf

DOI

10.1109/IEMBS.2007.4352253

Filename

4352253