Title :
A new design based on electro-thermally actuation for an SU-8 microgripper
Author :
Voicu, Rodica ; Muller, Raluca ; Eftime, Laura
Author_Institution :
Nat. Inst. for R&D in Microtechnologies, IMT-Bucharest, Bucharest
Abstract :
A new design for a polymeric microgripper was developed. Two microgripper with different dimensions were considered. An evaluation between these models was performed using the simulation results. Finite-element analyses of the microgripper, using COVENTORWARE, are performed in order to evaluate the relation between the displacement, temperatures and the electrical current passing through the metallic layers.
Keywords :
finite element analysis; grippers; micromanipulators; polymers; SU-8 microgripper; electrical current; electro-thermally actuation; finite-element analyses; metallic layers; polymeric microgripper; Actuators; Application software; Arm; Computer simulation; Finite element methods; Gold; Grippers; Performance evaluation; Polymers; Temperature; SU-8 polymer; electro-thermal actuator; microgripper; micromanipulation;
Conference_Titel :
Semiconductor Conference, 2008. CAS 2008. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-2004-9
DOI :
10.1109/SMICND.2008.4703369
