Title :
Technology and test of coplanar grounded wave-guides on micro-machined Si wafers
Author :
Lucibello, Andrea ; De Angelis, Giorgio ; Proietti, Emanuela ; Marcelli, Romolo ; Bartolucci, Giancarlo
Author_Institution :
CNR-IMM Roma, Roma
Abstract :
Coplanar wave-guide grounded lines (CPWG) have been designed, realized by micro-machining of high resistivity silicon wafers and tested up to 40 GHz. Different configurations have been compared between them by changing the dimensions of the micro-machined via-holes used for the ground connection, as well as their number and separation, to get the optimal electrical matching conditions. Wide-band matching and losses as low as 0.1-0.2 dB/mm have been obtained within the 40 GHz range, in agreement with the predicted behaviour.
Keywords :
coplanar waveguides; elemental semiconductors; micromachining; silicon; Si; coplanar grounded waveguides; coplanar waveguide grounded lines; electrical matching; ground connection; high resistivity silicon wafers; micromachined silicon wafers; waveguide losses; wide-band matching; Chromium; Conductivity; Coplanar waveguides; Electronic equipment testing; Etching; Gold; Micromachining; Resists; Silicon; Wideband; RF MEMS; micromachining;
Conference_Titel :
Semiconductor Conference, 2008. CAS 2008. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-2004-9
DOI :
10.1109/SMICND.2008.4703374
