Modeling and simulation of silicon-based planar transmission lines for micromachined filter applications

Author

Li, Jin ; Zhang, Xiaochuan ; Xu, Jun

Author_Institution

Inst. of Appl. Phys., Univ. of Electron. Sci. & Technol. of China, Chengdu, China

fYear

2012

fDate

3-4 Sept. 2012

Firstpage

1

Lastpage

3

Abstract

This paper presents CAD modeling and simulation of three kinds of micromachined planar transmission lines on 400 μm thick silicon substrate. Microtrip, microshield line and shielded membrane microstrip (SMM) are modeled and analyzed with Ansoft HFSS 13.0. Their physical structures and the corresponding simulated results are discussed and compared, respectively. Novel silicon-based filter design consideration is also introduced, and is a starting point for updating previous works on traditional hybrid integrated dielectric substrates.

Keywords

CAD; high-frequency transmission lines; micromachining; microstrip filters; microstrip lines; silicon; Ansoft HFSS 13.0; CAD modeling; CAD simulation; SMM; Si; hybrid integrated dielectric substrates; micromachined filter applications; micromachined planar transmission lines; microshield line; microstrip line; shielded membrane microstrip; silicon-based filter design; silicon-based planar transmission line modeling; silicon-based planar transmission line simulation; Semiconductor device modeling; Micromachined filter; microshield line; microstrip; planar transmission line; shielded membrane microstrip; silicon cavity; silicon-based;

fLanguage

English

Publisher

ieee

Conference_Titel

Integrated Nonlinear Microwave and Millimetre-Wave Circuits (INMMIC), 2012 Workshop on

Conference_Location

Dublin

Print_ISBN

978-1-4673-2950-7

Electronic_ISBN

978-1-4673-2948-4

Type

conf

DOI

10.1109/INMMIC.2012.6331921

Filename

6331921