DocumentCode

1819651

Title

Some Elctirical Properties Of Oc-fea Thin Films Made By Apcvd

Author

Chai, C.C. ; Peng, J. ; Yan, B.P.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

882

Lastpage

885

Keywords

Argon; Chemicals; Fluid flow; Gas detectors; Petroleum; Sputtering; Temperature control; Temperature sensors; Thin film sensors; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721980

Filename

721980