Title :
Some Elctirical Properties Of Oc-fea Thin Films Made By Apcvd
Author :
Chai, C.C. ; Peng, J. ; Yan, B.P.
Keywords :
Argon; Chemicals; Fluid flow; Gas detectors; Petroleum; Sputtering; Temperature control; Temperature sensors; Thin film sensors; Transistors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721980
