DocumentCode

1819925

Title

Investigation For Oxygen Sensor Of Laf3 Thin Film

Author

Tan, G.L. ; Zhang, W.M. ; Chen, Q.Y. ; Wan, H. ; Lu, W.X.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

886

Lastpage

889

Keywords

Actuators; Electrodes; Electrons; Gold; Oxygen; Sensor phenomena and characterization; Solid state circuits; Sputtering; Thin film sensors; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721981

Filename

721981