Title :
Investigation For Oxygen Sensor Of Laf3 Thin Film
Author :
Tan, G.L. ; Zhang, W.M. ; Chen, Q.Y. ; Wan, H. ; Lu, W.X.
Keywords :
Actuators; Electrodes; Electrons; Gold; Oxygen; Sensor phenomena and characterization; Solid state circuits; Sputtering; Thin film sensors; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721981
