Title :
CCD soft-x-ray detectors with improved high- and low-energy performance
Author :
Burke, B.E. ; Gregory, J.A. ; Loomis, A.H. ; Lesser, M. ; Bautz, M.W. ; Kissel, S.E. ; Rathman, D.D. ; Osgood, R.M., III ; Cooper, M.J.
Author_Institution :
Lincoln Lab., MIT, Lexington, MA, USA
Abstract :
We describe results from recent efforts to enhance the performance of CCDs to both low- and high-energy soft a rays. For improved low-energy (E<500 eV) sensitivity we show that a low-temperature surface treatment on back-illuminated devices results in generally better performance than that achieved on devices flown on Chandra, which had a more process-intensive high-temperature treatment. For improved high-energy response we describe a design approach for MOS CCDs that allows high substrate biases for deep depletion (>160 μm) and thus improved x-ray detection for E>5 keV.
Keywords :
CCD image sensors; X-ray detection; 160 micron; 5 keV; 500 eV; CCD soft-x-ray detectors; high-energy performance; improved x-ray detection; low-energy performance; low-temperature surface treatment; Charge coupled devices; Circuits; Detectors; Electromagnetic wave absorption; Laboratories; Radiative recombination; Space technology; Spontaneous emission; Surface treatment; X-ray detection;
Conference_Titel :
Nuclear Science Symposium Conference Record, 2003 IEEE
Print_ISBN :
0-7803-8257-9
DOI :
10.1109/NSSMIC.2003.1352062
