A planar fibre optic strain sensor using micromechanical resonators fabricated from (110) silicon wafers

The authors have demonstrated a planar, fibre optic/mechanical resonator strain sensor fabricated from (110) silicon. Their design has the potential for relatively simple and rapid alignment of the fibre to the sensor. Low optical power (few hundred microwatts at 830 nm) is required for excitation. With optical excitation and interrogation, the temperature sensitivity is only -20ppm/degree Centigrade whilst the strain sensitivity is around 2250 ppm/microstrain