DocumentCode
1821648
Title
Sensors based on silicon strain gauges
Author
Craddock, Russell
Author_Institution
Druck Ltd., Groby, UK
fYear
1993
fDate
34264
Firstpage
42491
Lastpage
42494
Abstract
Modern piezoresistive sensors demand a high level of accuracy, and a more exact knowledge of the mechanisms of piezoresistance is required. Theoretical calculations coupled with accurate finite element models can be used to design linear sensors
Keywords
electric sensing devices; elemental semiconductors; finite element analysis; piezoelectric transducers; piezoresistance; silicon; strain gauges; Si strain gauges; finite element models; linear sensor design; piezoresistance; piezoresistive sensors; semiconductor;
fLanguage
English
Publisher
iet
Conference_Titel
Sensing Via Strain, IEE Colloquium on
Conference_Location
London
Type
conf
Filename
287391
Link To Document