Title :
Thin film ZnO based bulk acoustic mode filters
Author :
Seabury, C.W. ; Kobrin, P.H. ; Addison, R. ; Havens, D.P.
Author_Institution :
Sci. Center, Rockwell Int. Corp., Thousand Oaks, CA, USA
Abstract :
We have used thin film ZnO bulk mode resonators on an acoustically reflecting solid glass substrate to produce a variety of filters in the 1-3 GHz frequency bands. Power handling is large (>2W). Overall filter dimensions are very small (/spl sim/1 mm), while lithography requirements are undemanding (>10 /spl mu/m). A range of ladder filters has been produced with an average rejection to insertion loss ratio of /spl sim/10. Monolithic inductors have also been used to improve characteristics over specified bands.
Keywords :
UHF filters; bulk acoustic wave devices; ladder filters; zinc compounds; 1 to 3 GHz; ZnO; acoustically reflecting solid glass substrate; bulk acoustic mode filters; filter dimensions; ladder filters; lithography requirements; monolithic inductors; power handling; rejection to insertion loss ratio; Frequency; Glass; Inductors; Insertion loss; Lithography; Resonator filters; Solids; Substrates; Transistors; Zinc oxide;
Conference_Titel :
Microwave Symposium Digest, 1997., IEEE MTT-S International
Conference_Location :
Denver, CO, USA
Print_ISBN :
0-7803-3814-6
DOI :
10.1109/MWSYM.1997.604551
