DocumentCode

1821837

Title

A New Approch To Low Drift Ta/sub2/O/sub5/ By pH Reactive Sputtering And Sol-gel Method

Author

Kwon, Dae-Hyuk ; Cho, Byung-Woog ; Kim, Chang-Soo ; Soh, Byung-Ki

Author_Institution

Kyungpook Sanup University

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

917

Lastpage

920

Keywords

Annealing; Biomembranes; Hydrogen; Linearity; Radio frequency; Sensor phenomena and characterization; Solid state circuits; Sputtering; Stability; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721989

Filename

721989