DocumentCode :
1821837
Title :
A New Approch To Low Drift Ta/sub2/O/sub5/ By pH Reactive Sputtering And Sol-gel Method
Author :
Kwon, Dae-Hyuk ; Cho, Byung-Woog ; Kim, Chang-Soo ; Soh, Byung-Ki
Author_Institution :
Kyungpook Sanup University
Volume :
2
fYear :
1995
fDate :
25-29 June 1995
Firstpage :
917
Lastpage :
920
Keywords :
Annealing; Biomembranes; Hydrogen; Linearity; Radio frequency; Sensor phenomena and characterization; Solid state circuits; Sputtering; Stability; Transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.721989
Filename :
721989
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1821837
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