DocumentCode
1821876
Title
Amorphous waveguides for high index photonic circuitry
Author
Lipka, T. ; Harke, A. ; Horn, O. ; Amthor, J. ; Müller, J.
Author_Institution
Hamburg Univ. of Technol., Hamburg
fYear
2009
fDate
22-26 March 2009
Firstpage
1
Lastpage
3
Abstract
Photonic wires, channel and rib waveguides as well as tapers were fabricated with amorphous silicon showing low propagation loss. Material analysis and RTA was carried out in order to tune the refractive index post deposition.
Keywords
amorphous semiconductors; elemental semiconductors; optical losses; optical waveguides; rapid thermal annealing; refractive index; rib waveguides; silicon; RTA; Si:H; amorphous silicon; channel waveguides; photonic wires; propagation loss; refractive index; rib waveguides; Amorphous materials; Amorphous silicon; Circuits; Crystalline materials; Crystallization; Optical materials; Optical refraction; Optical waveguides; Refractive index; Temperature; (230.7380) Waveguides, channeled; (310.3840) Materials and process characterization;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication - incudes post deadline papers, 2009. OFC 2009. Conference on
Conference_Location
San Diego, CA
Print_ISBN
978-1-4244-2606-5
Electronic_ISBN
978-1-55752-865-0
Type
conf
Filename
5032534
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