Title :
Fabrication And Characterisation Of Mercury-plated Iridium Microelectrode Arrays
Author :
Fiaccabrino, G.C. ; Tercier, M.-L. ; Buffle, J. ; de Rooij, N. ; Koudelka-Hep, M.
Author_Institution :
Institute of Microtechnology
Keywords :
Chemical technology; Chemistry; Circuits; Electrodes; Fabrication; Insulation; Microelectrodes; Resists; Transistors; Wafer bonding;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721994
