Fabrication And Characterisation Of Mercury-plated Iridium Microelectrode Arrays

Author

Fiaccabrino, G.C. ; Tercier, M.-L. ; Buffle, J. ; de Rooij, N. ; Koudelka-Hep, M.

Author_Institution

Institute of Microtechnology

Volume

fYear

1995

fDate

25-29 Jun 1995

Firstpage

936

Lastpage

937

Keywords

Chemical technology; Chemistry; Circuits; Electrodes; Fabrication; Insulation; Microelectrodes; Resists; Transistors; Wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.721994

Filename

721994

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