Title :
The investigation on research opportunities for the applications of the Internet of Things in semiconductor wafer fabrication
Author_Institution :
State Key Lab. of Ind. Control Technol., Zhejiang Univ., Hangzhou, China
Abstract :
Based on the state-of-the-art technologies of the Internet of Things (IOT) and Radio Frequency Identifier (RFID) this paper introduces the concepts of IOT/RFID and investigates its open research opportunity and potential applications in real-time monitoring and dispatch controls for semiconductor wafer fabrication (FAB).
Keywords :
Internet; integrated circuit manufacture; radiofrequency identification; wafer-scale integration; FAB; Internet of things; RFID; dispatch controls; radio frequency identifier; real-time monitoring; semiconductor wafer fabrication; state-of-the-art technologies; Inspection; Internet; Manufacturing; Optimization; Production; Radiofrequency identification; Real time systems; Internet of things (IOT); Monitoring and dispatch controls; Radio frequency identifier (RFID); Semiconductor wafer FAB;
Conference_Titel :
Industrial Engineering and Engineering Management (IEEM), 2010 IEEE International Conference on
Conference_Location :
Macao
Print_ISBN :
978-1-4244-8501-7
Electronic_ISBN :
2157-3611
DOI :
10.1109/IEEM.2010.5674282
