Title :
Plasma deposited multipactor coating for high power, sapphire, RF windows
Author :
Ives, R. Lawrence ; Marsden, D. ; Collins, George ; Lucovsky, Gerry ; Zeller, Daniell ; Schamiloglu, Edl
Author_Institution :
Calabazas Creek Res., Inc., San Mateo, CA, USA
Abstract :
This program developed a multipactor coating process for single crystal, sapphire, vacuum windows for high power RF transmission. The process replaces sputtered coatings, which are not tightly bonded to the crystal surface. The process creates molecular bonds between the AlO crystal surface and the TiN coating. The process was used to build a sapphire, RF window that was successfully tested to 45 MW.
Keywords :
crystals; microwave switches; plasma deposited coatings; sapphire; titanium compounds; Al2O3; RF windows; TiN; high power RF transmission; molecular bonds; plasma deposited multipactor coating; power 45 MW; sapphire; single crystal; sputtered coatings; vacuum windows; Coatings; Crystals; Plasmas; Radio frequency; Surface treatment; Testing; Tin; RF sources; RF windows; multipactor emission; remote plasma processing; sapphire;
Conference_Titel :
Vacuum Electronics Conference, IEEE International
Conference_Location :
Monterey, CA
DOI :
10.1109/IVEC.2014.6857552
