• DocumentCode
    182335
  • Title

    Plasma deposited multipactor coating for high power, sapphire, RF windows

  • Author

    Ives, R. Lawrence ; Marsden, D. ; Collins, George ; Lucovsky, Gerry ; Zeller, Daniell ; Schamiloglu, Edl

  • Author_Institution
    Calabazas Creek Res., Inc., San Mateo, CA, USA
  • fYear
    2014
  • fDate
    22-24 April 2014
  • Firstpage
    185
  • Lastpage
    186
  • Abstract
    This program developed a multipactor coating process for single crystal, sapphire, vacuum windows for high power RF transmission. The process replaces sputtered coatings, which are not tightly bonded to the crystal surface. The process creates molecular bonds between the AlO crystal surface and the TiN coating. The process was used to build a sapphire, RF window that was successfully tested to 45 MW.
  • Keywords
    crystals; microwave switches; plasma deposited coatings; sapphire; titanium compounds; Al2O3; RF windows; TiN; high power RF transmission; molecular bonds; plasma deposited multipactor coating; power 45 MW; sapphire; single crystal; sputtered coatings; vacuum windows; Coatings; Crystals; Plasmas; Radio frequency; Surface treatment; Testing; Tin; RF sources; RF windows; multipactor emission; remote plasma processing; sapphire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electronics Conference, IEEE International
  • Conference_Location
    Monterey, CA
  • Type

    conf

  • DOI
    10.1109/IVEC.2014.6857552
  • Filename
    6857552
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=182335