DocumentCode
1824189
Title
Analysis of space charge effects due to ESD in MEMS
Author
Greason, William D.
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Western Ontario, London, ON, Canada
fYear
2011
fDate
11-16 Sept. 2011
Firstpage
1
Lastpage
7
Abstract
Models are developed to study the effect of charge injection due to ESD in capacitive MEMS structures. These models enable the calculation of electric field and potential due to volume charge distributions in the air gap. Implications on the operation of MEMS structures are discussed.
Keywords
air gaps; charge injection; electric field effects; electrostatic discharge; micromechanical devices; space charge; ESD; air gap; capacitive MEMS structures; charge injection effect; electric field; space charge effect analysis; volume charge distributions; Atmospheric modeling; Dielectrics; Electric fields; Electric potential; Electrostatic discharge; Micromechanical devices; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2011 33rd
Conference_Location
Anaheim, CA
ISSN
Pending
Electronic_ISBN
Pending
Type
conf
Filename
6045596
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