DocumentCode

1824474

Title

Novel Potentiometric Silicon Sensor For Medical Devices

Author

Schnakenberg, Uwe ; Lisec, Thomas ; Hintsche, Rainer ; Kuna, Ingrid ; Uhlig, Albrecht ; Wagner, Bernd

Author_Institution

Fraunhofer-Institut fur Siliziumtechnologie

Volume

2

fYear

1995

fDate

25-29 Jun 1995

Firstpage

959

Lastpage

962

Keywords

Back; Biomembranes; Catheters; Chemical sensors; Electrodes; Etching; Fabrication; Micromachining; Platinum; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.722001

Filename

722001