Title :
Flow-through ordered macroporous silicon sensor for liquids detection
Author :
Parashchenko, Maksim A. ; Filippov, Nicolay S. ; Kirienko, Victor V. ; Romanov, Sergey I.
Author_Institution :
A.V. Rzhanov Inst. of Semicond. Phys., Novosibirsk, Russia
Abstract :
This paper has been devoted to a creation of flow-through sensor based on ordered macroporous silicon for electrophysical detection of liquids. Interactions of sensor with different liquids (deionized water, ethyl alcohol and sodium tetraborate in various concentrations) were studied by high frequency conductance measurements. It was established that the sensor had specific response for each liquid. It was shown that the proposed electrophysical method allowed identifying the liquid flowing through the sensor.
Keywords :
electric admittance measurement; electric sensing devices; elemental semiconductors; flow through porous media; organic compounds; porous semiconductors; silicon; water; H2O; Si; deionized water; electrophysical detection; ethyl alcohol; flow-through ordered macroporous silicon sensor; high frequency conductance measurements; liquid detection; sodium tetraborate; Biology; Conductivity; Frequency measurement; Liquids; Microchannel; Silicon; Temperature measurement; Ordered macroporous silicon; electrical sensor;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2013 14th International Conference of Young Specialists on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4799-0761-8
DOI :
10.1109/EDM.2013.6641931
