Title :
Compensation of shutter opening induced flux transients using a robust algorithm for the molecular beam epitaxy process
Author :
Adams, Stephen J.
Author_Institution :
Wright State Univ., Dayton, OH, USA
Abstract :
In this paper a robust control system for the reduction of the flux transient caused by a shutter opening on a molecular beam epitaxy machine was developed and implemented. This control system determines the temperature setpoint modification needed to reduce the transient below 1.08 variation. The process identification system will determine the characteristic of the disturbance and the transfer function of the system. From this data a compensation signal is calculated and applied to the setpoint temperature of the PID controller. A computer is used to automatically apply the setpoint signal to the PID controller. This compensator will be integrated into a MBE control system developed at the Materials Directorate of Wright Laboratory, Wright-Patterson Air Force Base, Ohio
Keywords :
compensation; molecular beam epitaxial growth; process computer control; stability; temperature control; three-term control; transfer functions; transients; Materials Directorate; PID controller; Wright Laboratory; Wright-Patterson Air Force Base; compensation signal; disturbance; molecular beam epitaxy process; process identification system; robust control system; shutter opening induced flux transients; temperature setpoint modification; transfer function; Composite materials; Crystalline materials; Infrared detectors; Lattices; Molecular beam epitaxial growth; Optical materials; Robust control; Robustness; Substrates; Three-term control;
Conference_Titel :
System Theory, 1994., Proceedings of the 26th Southeastern Symposium on
Conference_Location :
Athens, OH
Print_ISBN :
0-8186-5320-5
DOI :
10.1109/SSST.1994.287801
