Title :
A novel pressure balanced microfluidic valve
Author :
Quero, J.M. ; Luque, A. ; Franquelo, L.G.
Author_Institution :
Dpto. Ingenieria Electronica, Seville Univ., Spain
Abstract :
A microfluidic valve capable of driving fluids under high (up to 10 atm) pressure is presented. The valve actuation is based on a principle of pressure compensation by means of an air chamber that supports a moving membrane. The air balances the fluid pressure, and then an electrostatic actuator can open the valve. This valve is designed with valve arrays in mind. In such configurations, it is useful for analysis, biology and medicine applications
Keywords :
arrays; biomedical equipment; electrostatic actuators; fluidic devices; membranes; microfluidics; microvalves; pressure; 10 atm; MEMS; air/fluid pressure balance; biology applications; electrostatic actuators; high pressure microfluidic valves; medicine applications; micro-analysis applications; moving membrane supporting air chamber; pressure balanced microfluidic valves; pressure compensation; valve actuation; valve arrays; Biomembranes; Electrodes; Electrostatic actuators; Fluidic microsystems; Microfluidics; Microvalves; Orifices; Systems biology; Thermal expansion; Valves;
Conference_Titel :
Circuits and Systems, 2002. ISCAS 2002. IEEE International Symposium on
Conference_Location :
Phoenix-Scottsdale, AZ
Print_ISBN :
0-7803-7448-7
DOI :
10.1109/ISCAS.2002.1011421
