DocumentCode

1826582

Title

Dielectric Membrane Technology For Conductivity And Work-function Gas Sensors

Author

Bergstrom, P.L. ; Merchant, R. ; Wise, K.D. ; Schwank, J.W.

Author_Institution

The University of Michigan

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

993

Lastpage

996

Keywords

Biomembranes; Circuits; Conductive films; Conductivity; Dielectric thin films; Gas detectors; Sensor arrays; Silicon; Substrates; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.722010

Filename

722010