Title :
Dielectric Membrane Technology For Conductivity And Work-function Gas Sensors
Author :
Bergstrom, P.L. ; Merchant, R. ; Wise, K.D. ; Schwank, J.W.
Author_Institution :
The University of Michigan
Keywords :
Biomembranes; Circuits; Conductive films; Conductivity; Dielectric thin films; Gas detectors; Sensor arrays; Silicon; Substrates; Temperature sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.722010
