Title :
A dual frequency range integrated circuit accelerometer using capacitive and piezoelectric sensing techniques
Author :
Harjani, Ramesh ; Polla, D.L. ; Tamagawa, T.
Keywords :
Acceleration; Accelerometers; Capacitance; Capacitive sensors; Charge measurement; Current measurement; Frequency measurement; Integrated circuit measurements; Piezoelectric films; Structural beams;
Conference_Titel :
Circuits and Systems, 1993., ISCAS '93, 1993 IEEE International Symposium on
Conference_Location :
IEEE
Print_ISBN :
0-7803-1281-3
