• DocumentCode
    1827244
  • Title

    A dual frequency range integrated circuit accelerometer using capacitive and piezoelectric sensing techniques

  • Author

    Harjani, Ramesh ; Polla, D.L. ; Tamagawa, T.

  • fYear
    1993
  • fDate
    3-6 May 1993
  • Firstpage
    1120
  • Lastpage
    1123
  • Keywords
    Acceleration; Accelerometers; Capacitance; Capacitive sensors; Charge measurement; Current measurement; Frequency measurement; Integrated circuit measurements; Piezoelectric films; Structural beams;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Circuits and Systems, 1993., ISCAS '93, 1993 IEEE International Symposium on
  • Conference_Location
    IEEE
  • Print_ISBN
    0-7803-1281-3
  • Type

    conf

  • Filename
    692846
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1827244