DocumentCode
1827779
Title
Measurement of anisotropy in the thermal conductivity of Ge2 Sb2 Te5 films
Author
Lee, Jaeho ; Reifenberg, John P. ; Li, Zijian ; Hom, Lewis ; Asheghi, Mehdi ; Kim, SangBum ; Wong, H. S Philip ; Goodson, Kenneth E.
Author_Institution
Dept. of Mech. Eng., Stanford Univ., Stanford, CA, USA
fYear
2009
fDate
25-28 Oct. 2009
Firstpage
52
Lastpage
57
Abstract
This work measures both the out-of-plane and the in-plane thermal conductivities of Ge2Sb2Te5 (GST) films in the amorphous (a), face-centered-cubic (c), and hexagonal close packed (h) phases using the 3¿ method. The out-of-plane thermal conductivity, kz, is first measured from a wide heater. The data include 0.17 W/mK for a-GST, 0.55 W/mK and 1.01 W/mK for c-GST of annealing temperature 150°C and 200°C respectively, and 2.85 W/mK for h-GST. The GST film is rf-sputtered with film thickness nearly 600 nm to capture significant lateral spreading from a narrow heater. The measured out-of-plane thermal conductivity is used in the multi-layer heat diffusion equation to deduce the in-plane thermal conductivity, kr. The measurements from the varying heater width reveal that the anisotropy ratio (¿ = kr/kz) to be 1 for amorphous GST and ~0.6 for different forms of crystalline GST. Electrothermal simulation demonstrates that the thermal conductivity anisotropy possesses potential impact on the designs of novel phase change memory that are based on lateral structure.
Keywords
annealing; antimony compounds; chalcogenide glasses; germanium compounds; glass structure; semiconductor thin films; sputtered coatings; thermal conductivity; thermal diffusivity; 3¿ method; Ge2Sb2Te3; amorphous phase; annealing temperature; crystalline phase; electrothermal simulations; face-centered-cubic phase; film thickness; heater width; hexagonal close packed phase; in-plane thermal conductivity; multilayer heat diffusion equation; narrow heater; out-of-plane thermal conductivity; phase change memory design; rf sputtering; thermal conductivity anisotropy ratio; thin films; wide heater; Amorphous materials; Anisotropic conductive films; Anisotropic magnetoresistance; Annealing; Conductivity measurement; Equations; Phase measurement; Tellurium; Temperature; Thermal conductivity; 3-omega (3ω) method; Anisotropy; GeSbTe (GST); Lateral Phase Change Memory (PCM); Phase Change Material; Thermal Characterization; Thermal Conductivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Non-Volatile Memory Technology Symposium (NVMTS), 2009 10th Annual
Conference_Location
Portland, OR
Print_ISBN
978-1-4244-4953-8
Electronic_ISBN
978-1-4244-4954-5
Type
conf
DOI
10.1109/NVMT.2009.5429777
Filename
5429777
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