DocumentCode
1828172
Title
Practical application of statistical process control in semiconductor manufacturing
Author
Beck, Brian
Author_Institution
StorageTek, Louisville, CO, USA
fYear
1993
fDate
17-21 Oct 1993
Firstpage
99
Lastpage
107
Abstract
The application of statistical process control to semiconductor processes is hampered by the complexity of the processes. This paper aims to show intuitively how SPC can be utilized to prevent defects in a manufacturing environment through monitoring of supplier processes
Keywords
VLSI; inspection; integrated circuit testing; production testing; semiconductor technology; statistical process control; SPC; complexity; defects prevention; functional tests; manufacturing environment; monitoring of supplier processes; semiconductor manufacturing; statistical process control; streamlining; Assembly; Design engineering; Feedback; Manufacturing processes; Monitoring; Performance evaluation; Process control; Pulp manufacturing; Semiconductor device manufacture; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Conference, 1993. Proceedings., International
Conference_Location
Baltimore, MD
Print_ISBN
0-7803-1430-1
Type
conf
DOI
10.1109/TEST.1993.470713
Filename
470713
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