Optimal design of piezoelectric-driven tilting mirror for laser scanner

Author

Park, Jung-Ho ; Lee, Hu-Seung ; Lee, Jae-Hoon ; Ham, Young-Bog ; Yun, So-Nam

Author_Institution

Energy Plant Res. Div., Korea Inst. of Machinery & Mater., Daejeon, South Korea

fYear

2011

fDate

17-20 Aug. 2011

Firstpage

511

Lastpage

515

Abstract

Recently, laser scanners have been used for laser processing such as cutting, welding and grooving. It needs a highspeed driving to minimize crack caused by thermal shock of brittle materials. Therefore, a novel laser processing system has been investigated that is composed of a laser source and a piezoelectric-driven tilting mirror to control reflection angle of laser beam, and a stage equipped with the tilting mirror. In this study, a piezoelectric-driven tilt mirror is designed and analyzed for scanning performance that needs to make a beam spot of 30μm, a pattern width of 1mm, and scanning speed of 1m/s. Then, structural analysis on the tilting mirror with three piezoelectric actuators is calculated to determine maximum reflection angle, resonance frequency.

Keywords

laser beam cutting; laser beam welding; laser mirrors; light reflection; optical design techniques; optical scanners; piezoelectric actuators; brittle materials; crack; cutting; grooving; laser beam; laser processing; laser scanner; laser source; optimal design; piezoelectric actuators; piezoelectric-driven tilting mirror; reflection angle; resonance frequency; structural analysis; thermal shock; welding; Laser beam cutting; Laser beams; Mirrors; Piezoelectric actuators; Resonant frequency; Stress; flexure mechanism; laser scanner; piezoelectric actuator; reflection angle; tilting mirror;

fLanguage

English

Publisher

ieee

Conference_Titel

Fluid Power and Mechatronics (FPM), 2011 International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4244-8451-5

Type

conf

DOI

10.1109/FPM.2011.6045818

Filename

6045818