• DocumentCode
    1828939
  • Title

    Contact Resistance in Flat Thin Films

  • Author

    Read, M.B. ; Lang, J.H. ; Slocum, A.H. ; Martens, R.

  • fYear
    2009
  • fDate
    14-16 Sept. 2009
  • Firstpage
    303
  • Lastpage
    309
  • Keywords
    Contact resistance; Electric resistance; Electrical resistance measurement; Force measurement; Geometry; Mechanical engineering; Micromechanical devices; Surface resistance; System testing; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Contacts, 2009 Proceedings of the 55th IEEE Holm Conference on
  • Conference_Location
    Vancouver, British Columbia, Canada
  • Print_ISBN
    978-1-4244-3613-2
  • Electronic_ISBN
    978-1-4244-3613-2
  • Type

    conf

  • DOI
    10.1109/HOLM.2009.5284385
  • Filename
    5284385
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1828939