Title :
Characterization and modeling of on-chip inductor substrate coupling effect
Author :
Chao, C.-J. ; Shyh-Chyi Wong ; Chia-Jen Hsu ; Ming-Jer Chen ; Len-Yi Leu
Abstract :
The substrate coupling effects of two adjacent coplanar spiral inductors are characterized and modeled. The noise magnitude between two 45 /spl mu/m-away inductors can be reduced by 6.83 dB by using guard-rings surrounding each inductor, and improved by 10.28 dB further by adding a patterned ground polysilicon shield beneath at 3 GHz. Inductors with patterned polysilicon shields show improved quality factor and noise isolation. Moreover, a macro model is presented for modeling quality factor and inductance of on-chip spiral inductors and associated neighboring inductors´ coupling noise effect.
Keywords :
MMIC; Q-factor; S-parameters; electromagnetic coupling; inductance; inductors; integrated circuit modelling; integrated circuit noise; 0.25 micron; 3 GHz; 5-level metal CMOS technology; S-parameters; adjacent coplanar spiral inductors; coupling noise effect; guard-ring; inductance; macro model; modeling; monolithic RFIC designs; noise isolation; noise magnitude; patterned ground polysilicon shield; quality factor; substrate coupling effects; CMOS technology; Coils; Dielectric substrates; Frequency; Inductance; Inductors; Q factor; Radiofrequency integrated circuits; Scattering parameters; Spirals;
Conference_Titel :
Microwave Symposium Digest, 2002 IEEE MTT-S International
Conference_Location :
Seattle, WA, USA
Print_ISBN :
0-7803-7239-5
DOI :
10.1109/MWSYM.2002.1011583
