Characterization and modeling of on-chip inductor substrate coupling effect

Author

Chao, C.-J. ; Shyh-Chyi Wong ; Chia-Jen Hsu ; Ming-Jer Chen ; Len-Yi Leu

Volume

1

fYear

2002

fDate

2-7 June 2002

Firstpage

157

Abstract

The substrate coupling effects of two adjacent coplanar spiral inductors are characterized and modeled. The noise magnitude between two 45 /spl mu/m-away inductors can be reduced by 6.83 dB by using guard-rings surrounding each inductor, and improved by 10.28 dB further by adding a patterned ground polysilicon shield beneath at 3 GHz. Inductors with patterned polysilicon shields show improved quality factor and noise isolation. Moreover, a macro model is presented for modeling quality factor and inductance of on-chip spiral inductors and associated neighboring inductors´ coupling noise effect.

Keywords

MMIC; Q-factor; S-parameters; electromagnetic coupling; inductance; inductors; integrated circuit modelling; integrated circuit noise; 0.25 micron; 3 GHz; 5-level metal CMOS technology; S-parameters; adjacent coplanar spiral inductors; coupling noise effect; guard-ring; inductance; macro model; modeling; monolithic RFIC designs; noise isolation; noise magnitude; patterned ground polysilicon shield; quality factor; substrate coupling effects; CMOS technology; Coils; Dielectric substrates; Frequency; Inductance; Inductors; Q factor; Radiofrequency integrated circuits; Scattering parameters; Spirals;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2002 IEEE MTT-S International

Conference_Location

Seattle, WA, USA

ISSN

0149-645X

Print_ISBN

0-7803-7239-5

Type

conf

DOI

10.1109/MWSYM.2002.1011583

Filename

1011583