Title :
Toggle-switch - a new type of RF MEMS switch for power applications
Author :
Schauwecker, B. ; Strohm, K.A. ; Simon, W. ; Mehner, J. ; Luy, J.-F.
Author_Institution :
DaimlerChrysler AG, Res. & Technol., Ulm, Germany
Abstract :
A new type of RF MEMS switch for power applications using a push-pull concept is described. The switching element consist of a cantilever which is fixed by a suspension spring to the ground of the coplanar lines. The switching voltages are 30 V to close and 35 V to open. The switches exhibit low loss (<0.2 dB at 27 GHz) with good isolation (20 dB at 27 GHz).
Keywords :
micromechanical devices; microwave switches; 0.2 dB; 27 GHz; 30 V; 35 V; RF MEMS switch; cantilever switching element; coplanar; power applications; push-pull concept; suspension spring; toggle switch; Contacts; Dielectric substrates; Electrodes; Gold; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Springs; Switches; Voltage;
Conference_Titel :
Microwave Symposium Digest, 2002 IEEE MTT-S International
Conference_Location :
Seattle, WA, USA
Print_ISBN :
0-7803-7239-5
DOI :
10.1109/MWSYM.2002.1011597
