DocumentCode
1829896
Title
Fabrication of advanced integrated optical micro-encoder chip
Author
Sawada, R. ; Ohguchi, O. ; Mise, K. ; Tsubamoto, M.
Author_Institution
Interdisciplinary Res. Labs., NTT, Tokyo, Japan
fYear
1994
fDate
1994
Firstpage
337
Lastpage
342
Abstract
An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters
Keywords
integrated optics; gradient-refractive-index-lens film; grating scale; integrated optical micro-encoder chip; laser diode; microencoder; optical films; phase-shifting film; polyimide waveguides; traveling direction; traveling displacement; Diode lasers; Displacement measurement; Integrated optics; Lenses; Microoptics; Mirrors; Optical device fabrication; Optical films; Optical waveguides; Photodiodes;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on
Conference_Location
Oiso
Print_ISBN
0-7803-1833-1
Type
conf
DOI
10.1109/MEMSYS.1994.555836
Filename
555836
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