DocumentCode
1831906
Title
Notice of Retraction
Design and fabrication of a low-power and nanoporous micro-hotplate for chemical sensor applications with high sensitivity
Author
Sheng-Po Wu ; Yong-Sheng Huang ; Chih-Cheng Lu ; Jen-Tzong Jeng
Author_Institution
Inst. of Mechatron. Eng., Nat. Taipei Univ. of Technol., Taipei, Taiwan
Volume
2
fYear
2010
fDate
1-3 Aug. 2010
Abstract
Notice of Retraction
After careful and considered review of the content of this paper by a duly constituted expert committee, this paper has been found to be in violation of IEEE´s Publication Principles.
We hereby retract the content of this paper. Reasonable effort should be made to remove all past references to this paper.
The presenting author of this paper has the option to appeal this decision by contacting TPII@ieee.org.
The paper describes a conceptual platform development, including design, simulation and manufacture in nanoporous biomedical and chemical sensor applications. We exploit anodic aluminum oxidation (AAO) technology to produce an excellent nanoporous surface for fast gas detection, and combine with micro-electromechanical systems (MEMS) process to implement micro-sized devices with low power consumption. In order to compare the substantial difference between nanoporous and conventionally flat silicon oxide surfaces, a finite element method (FEM) tool such as ANSYS was employed to carry out coupled-field electro-thermal simulations and verify the low-power features of nanoporous device design. Finally, we succeed to fabricate nanoporous devices as a superior CMOS-MEMS platform for promising applications in bio-chemical and medical fields.
After careful and considered review of the content of this paper by a duly constituted expert committee, this paper has been found to be in violation of IEEE´s Publication Principles.
We hereby retract the content of this paper. Reasonable effort should be made to remove all past references to this paper.
The presenting author of this paper has the option to appeal this decision by contacting TPII@ieee.org.
The paper describes a conceptual platform development, including design, simulation and manufacture in nanoporous biomedical and chemical sensor applications. We exploit anodic aluminum oxidation (AAO) technology to produce an excellent nanoporous surface for fast gas detection, and combine with micro-electromechanical systems (MEMS) process to implement micro-sized devices with low power consumption. In order to compare the substantial difference between nanoporous and conventionally flat silicon oxide surfaces, a finite element method (FEM) tool such as ANSYS was employed to carry out coupled-field electro-thermal simulations and verify the low-power features of nanoporous device design. Finally, we succeed to fabricate nanoporous devices as a superior CMOS-MEMS platform for promising applications in bio-chemical and medical fields.
Keywords
anodisation; biosensors; chemical sensors; electric heating; finite element analysis; microsensors; nanofabrication; nanoporous materials; sensitivity; anodic aluminum oxidation technology; biomedical sensor; chemical sensor; coupled-field electro-thermal simulations; fabrication; finite element method; flat silicon oxide surfaces; gas detection; micro-sized devices; microelectromechanical systems; nanoporous micro-hotplate; nanoporous surface; sensitivity; Aluminum; Biological system modeling; Computational modeling; Finite element methods; Micromechanical devices; Silicon; Surface treatment; MEMS; anodic aluminum oxidation (AAO); finite element method (FEM); nano-porous;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechanical and Electronics Engineering (ICMEE), 2010 2nd International Conference on
Conference_Location
Kyoto
Print_ISBN
978-1-4244-7479-0
Type
conf
DOI
10.1109/ICMEE.2010.5558473
Filename
5558473
Link To Document