Notice of RetractionDesign and fabrication of a low-power and nanoporous micro-hotplate for chemical sensor applications with high sensitivity

Notice of Retraction

After careful and considered review of the content of this paper by a duly constituted expert committee, this paper has been found to be in violation of IEEE´s Publication Principles.

We hereby retract the content of this paper. Reasonable effort should be made to remove all past references to this paper.

The presenting author of this paper has the option to appeal this decision by contacting TPII@ieee.org.

The paper describes a conceptual platform development, including design, simulation and manufacture in nanoporous biomedical and chemical sensor applications. We exploit anodic aluminum oxidation (AAO) technology to produce an excellent nanoporous surface for fast gas detection, and combine with micro-electromechanical systems (MEMS) process to implement micro-sized devices with low power consumption. In order to compare the substantial difference between nanoporous and conventionally flat silicon oxide surfaces, a finite element method (FEM) tool such as ANSYS was employed to carry out coupled-field electro-thermal simulations and verify the low-power features of nanoporous device design. Finally, we succeed to fabricate nanoporous devices as a superior CMOS-MEMS platform for promising applications in bio-chemical and medical fields.