Title :
A 21.2μA ΔΣ-based interface ASIC for a capacitive 3-axis micro-accelerometer
Author :
Paavola, Matti ; Kämäräinen, Mika ; Laulainen, Erkka ; Saukoski, Mikko ; Koskinen, Lauri ; Kosunen, Marko ; Halonen, Kari
Author_Institution :
SMARAD-2/Electron. Circuit Design Lab., Helsinki Univ. of Technol., Espoo
Abstract :
In this paper, a micropower interface IC for a capacitive 3-axis micro-accelerometer implemented in a 0.25-mum CMOS process is presented. The fully-integrated sensor interface consists of a DeltaSigma sensor front-end that converts the acceleration signal into the digital domain, a decimator, a frequency reference, a clock generator for the front-end, a voltage and current reference, the required reference buffers, and low-dropout regulators (LDOs) needed for system-on-chip power management. The interface IC provides operating modes for 1 and 25 Hz signal bandwidths. The chip with a 1.72 mm2 active area draws 21.2 muA in 1 Hz mode, and 97.6 muA in 25 Hz mode, from a 1.2-2.75 V supply. In 1 Hz mode with a plusmn2 -g capacitive 3-axis accelerometer, the measured noise floors in the x-, y-, and z-directions are 1080, 1165 and 930 mug/radicHz, respectively.
Keywords :
CMOS integrated circuits; accelerometers; application specific integrated circuits; capacitive sensors; delta-sigma modulation; low-power electronics; microsensors; system-on-chip; CMOS process; DeltaSigma-based micropower interface ASIC; acceleration signal; bandwidth 1 Hz; bandwidth 25 Hz; capacitive 3-axis micro-accelerometer; clock generator; current 21.2 muA; current 97.6 muA; fully-integrated sensor interface; low-dropout regulators; size 0.25 mum; system-on-chip power management; voltage 1.2 V to 2.75 V; Acceleration; Application specific integrated circuits; CMOS integrated circuits; CMOS process; Clocks; Frequency conversion; Power generation; Sensor systems; Signal generators; Voltage;
Conference_Titel :
Solid-State Circuits Conference, 2008. A-SSCC '08. IEEE Asian
Conference_Location :
Fukuoka
Print_ISBN :
978-1-4244-2604-1
Electronic_ISBN :
978-1-4244-2605-8
DOI :
10.1109/ASSCC.2008.4708739
