Title :
New high-density multilayer technology on PCB
Author :
Shimoto, Tadanori ; Matsui, Koji ; Shimada, Yuzo ; Utsumi, Kazuaki
Author_Institution :
Mater. Dev. Center, NEC Corp., Kawasaki, Japan
Abstract :
We have developed a new high-density multilayer technology on PCB (Printed Circuit Board), named DSOL (Deposited Substrate On Laminate) technology. The first characteristic of the DSOL technology is the dielectric fabrication, which uses a new photosensitive material, a bulky fluorene unit bonded epoxy acrylate resin. The fluorene based resin has interesting properties such as good electrical properties, low curing temperature (160°C) for a heat-resistant resin (glass transition temperature: 230°C), low coefficient of thermal expansion (40 ppm), and high resolution. In particular, the dielectric formation process has the advantage that fine and high-aspect-ratio via holes are formed on FR-4 laminates through exactly the same process and manufacturing facilities as a conventional photosensitive epoxy resin. The second characteristic is the technology which patterns fine-pitch copper conductors using a semi-additive process with a sputtering method. This technology makes 40 μm pitch lines on large-area laminates possible, as this process consists of flash wet etching of only 0.3 μm thick sputtered thin-films. We have successfully developed a high-density packaging substrate for high-pin-count area array ASIC (Application Specific Integrated Circuit) chips (3828 pins). A high-density substrate based on the DSOL technology is the most suitable for achieving high-density packages (MCMs, CSPs, and BGAs) using fine-pitch and area array interconnection technologies
Keywords :
application specific integrated circuits; etching; fine-pitch technology; integrated circuit interconnections; integrated circuit packaging; laminates; printed circuit manufacture; thermal expansion; 160 degC; 40 micron; ASIC; DSOL; FR-4 laminates; PCB; area array interconnection; coefficient of thermal expansion; curing temperature; deposited substrate on laminate; epoxy acrylate resin; fine-pitch conductors; flash wet etching; high-aspect-ratio via holes; high-density multilayer technology; high-density packaging substrate; large-area laminates; photosensitive material; resolution; semi-additive process; sputtering method; Application specific integrated circuits; Dielectric substrates; Fabrication; Integrated circuit packaging; Integrated circuit technology; Laminates; Nonhomogeneous media; Printed circuits; Resins; Temperature;
Conference_Titel :
Electronic Components & Technology Conference, 1998. 48th IEEE
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-4526-6
DOI :
10.1109/ECTC.1998.678686