Title :
Automated RF/DC Testing of Microwave Device Wafers
Author :
Ziegner, Bernhard
Author_Institution :
M/A-COM ADVANCED SEMICONDUCTOR OPERATIONS, 100 CHELMSFORD STREET, LOWELL, MA 01851, TELEPHONE: (617) 937-2885
Abstract :
An automated wafer level RF/DC test system useful to frequency above 20 GHz has been developed to characterize and determine acceptability of microwave semiconductor die prior to dicing the wafer. This concept has been implemented by the integration of a programmable wafer prober with both an automated DC and RF automatic network analyzer. The entire measurement is under computer control.
Keywords :
Automatic testing; Electromagnetic heating; Gallium arsenide; Microwave devices; Power measurement; Radio frequency; Semiconductor device testing; Semiconductor devices; System testing; Wafer scale integration;
Conference_Titel :
ARFTG Conference Digest-Spring, 29th
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-5686-1
DOI :
10.1109/ARFTG.1987.323863
