Where Are My On-Wafer Reference Planes?

In order to characterize the accuracy of on-wafer measurements, there is the need to understand microwave waver probe calibrations over a matrix of planar transmission line types, sizes, and substrate materials. One of the calibration issues which arise is the electrical lengths of the planar calibration standards relative to each other and relative to the device under test. In this paper, three techniques for verifition of planar calibration standards are presented and shown to agree within ±0.1 ps of electrical length.