Notice of RetractionAnalysis of a monometallic two arm horizontal thermal actuator for MEMS

Notice of Retraction

After careful and considered review of the content of this paper by a duly constituted expert committee, this paper has been found to be in violation of IEEE´s Publication Principles.

We hereby retract the content of this paper. Reasonable effort should be made to remove all past references to this paper.

The presenting author of this paper has the option to appeal this decision by contacting TPII@ieee.org.

This paper presents Finite Element Analysis of a horizontal monometallic thermal actuator for MEMS application with three different materials namely Single Crystal Silicon, Poly-Silicon and Titanium. It is aimed to predict the suitability of the three materials for the actuator. Using the software COMSOL™ Multiphysics 3.5, deflection, stress and temperature analyses are carried out, for a range of applied voltages within 8V. Two sets of boundary conditions are considered in this work. In the first case all the boundary conditions are set as having conductive heat flux and in the second case the micro air gap between the two arms of the actuator is considered as an insulating layer. By employing these two cases, a comparison study is presented. It is seen that Titanium and Single Crystal Silicon has high temperature generation and less deflection respectively for the range of applied voltages, but for moderate deflection and temperature generation Poly-Silicon is better than the other two.