DocumentCode
1834946
Title
The properties of micromechanical resonator
Author
Jin, Zhonghe ; Wang, Yaolin ; Xu, Yigang ; Ding, Chun
Author_Institution
Zhejiang Univ., Hangzhou, China
fYear
1995
fDate
24-28 Oct 1995
Firstpage
482
Lastpage
484
Abstract
A theoretical and experimental study is presented on the response of a micromechanical resonator. Emphasis is placed on the study of double frequency and nonlinear behaviour
Keywords
frequency response; micromechanical resonators; double frequency response; electrostatically-excited resonator; micromechanical resonator; nonlinear behaviour; resonator response; Capacitors; Electrodes; Electrostatics; Equations; Force sensors; Frequency; Micromechanical devices; Resonance; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology, 1995 4th International Conference on
Conference_Location
Beijing
Print_ISBN
0-7803-3062-5
Type
conf
DOI
10.1109/ICSICT.1995.503325
Filename
503325
Link To Document