Title :
The properties of micromechanical resonator
Author :
Jin, Zhonghe ; Wang, Yaolin ; Xu, Yigang ; Ding, Chun
Author_Institution :
Zhejiang Univ., Hangzhou, China
Abstract :
A theoretical and experimental study is presented on the response of a micromechanical resonator. Emphasis is placed on the study of double frequency and nonlinear behaviour
Keywords :
frequency response; micromechanical resonators; double frequency response; electrostatically-excited resonator; micromechanical resonator; nonlinear behaviour; resonator response; Capacitors; Electrodes; Electrostatics; Equations; Force sensors; Frequency; Micromechanical devices; Resonance; Silicon; Voltage;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1995 4th International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-3062-5
DOI :
10.1109/ICSICT.1995.503325
