Title :
On-Wafer Microwave Standards at NIST
Author_Institution :
National Institute of Standards and Technology, Boulder Colorado
Abstract :
The National Institute of Standards and Technology has begun a program to develop standards and calibration services for microwave wafer-level probing systems. The standards will be based on planar transmission lines and are designed to support measurements between 1 and 40 GHz. The program objectives, organization, and plans are discussed.
Keywords :
Calibration; Conductors; Coplanar waveguides; MMICs; Measurement standards; Microstrip; NIST; Probes; Scattering parameters; Standards development; MMIC; calibration; microwave; scattering parameter; standards; wafer probe;
Conference_Titel :
ARFTG Conference Digest-Winter, 34th
Conference_Location :
Ft. Lauderdale, FL, USA
Print_ISBN :
0-7803-5686-1
DOI :
10.1109/ARFTG.1989.323951
