Title :
On-Wafer Power Measurements
Author :
Dawson, Dale E. ; Salib, Mike L.
Author_Institution :
P. 0. Box 1521, MS 3Kll, Westinghouse Electric Corporation, Baltimore, MD 21203
fDate :
Nov. 30 1989-Dec. 1 1989
Abstract :
Wafer maps of output power have been obtained at the 2 watt level by onwafer probing. to prevent chip burn out, and the measurement accuracy. This paper describes the probing technique, what has been done to prevent chip burn out, and the measurement accuracy.
Keywords :
Electric breakdown; FETs; Gold; MMICs; Measurement standards; Power measurement; Power supplies; Probes; Q measurement; Radio frequency;
Conference_Titel :
ARFTG Conference Digest-Winter, 34th
Conference_Location :
Ft. Lauderdale, FL, USA
Print_ISBN :
0-7803-5686-1
DOI :
10.1109/ARFTG.1989.323959
