Title :
Microwave characterization of thin film BST material using a simple measurement technique
Author :
Zhang Jin ; Tombak, A. ; Maria, J.-P. ; Boyette, B. ; Stauf, G.T. ; Kingon, A.I. ; Mortazawi, A.
Author_Institution :
Dept. of Electr. & Comput. Eng., North Carolina State Univ., Raleigh, NC, USA
Abstract :
Thin film barium strontium titanate (BST) in the parallel plate capacitors is characterized at microwave frequencies using a simple measurement technique. Short standards are fabricated on the same wafer as the BST capacitors to remove the parasitics of pads, lines, discontinuities and electrodes. The dielectric constant of the patterned BST thin film in the parallel plate capacitor is found to be frequency independent up to 10 GHz. The average loss tangent of BST thin film for the sample under test is approximately 0.006 and also found to be frequency independent up to 10 GHz.
Keywords :
barium compounds; dielectric loss measurement; dielectric thin films; microwave materials; microwave measurement; permittivity measurement; strontium compounds; thin film capacitors; 10 GHz; BST thin film; BaSrTiO/sub 3/; dielectric constant; loss tangent; microwave measurement; parallel plate capacitor; Barium; Binary search trees; Capacitors; Dielectric materials; Dielectric thin films; Measurement techniques; Microwave frequencies; Strontium; Titanium compounds; Transistors;
Conference_Titel :
Microwave Symposium Digest, 2002 IEEE MTT-S International
Conference_Location :
Seattle, WA, USA
Print_ISBN :
0-7803-7239-5
DOI :
10.1109/MWSYM.2002.1011868
