Gas damping model for a RF MEM switch and its dynamic characteristics

Author

Veijola, T. ; Tinttunen, T. ; Nieminen, H. ; Ermolov, V. ; Ryhanen, T.

Author_Institution

Dept. of Electr. & Commun. Eng., Helsinki Univ. of Technol., Espoo, Finland

Volume

2

fYear

2002

fDate

2-7 June 2002

Firstpage

1213

Abstract

A compact model for a capacitive RF MEM switch with damping is presented. The damping model is based on analytic expressions for flow resistances due to the rarefied air flow in the gap and in the perforation holes. The complete switch model is constructed of elements resulting from the discretization of the beam deflection equation and has been implemented as a nonlinear electrical equivalent circuit. The model reproduces the beam displacement accurately. Comparison with measured transient on/off capacitance characteristics shows very good agreement.

Keywords

UHF devices; channel flow; damping; deformation; electrostatic actuators; equivalent circuits; flow simulation; microfluidics; microwave switches; modelling; beam deflection equation; beam displacement; capacitive RF MEMS switch; circuit simulation model; dynamic characteristics; flow resistances; gap; gas damping model; nonlinear electrical equivalent circuit; perforated beam; perforation holes; rarefied air flow; switch model; switching characteristics; Bridge circuits; Capacitance; Communication switching; Damping; Electrostatics; Equivalent circuits; Radio frequency; Springs; Switches; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2002 IEEE MTT-S International

Conference_Location

Seattle, WA, USA

ISSN

0149-645X

Print_ISBN

0-7803-7239-5

Type

conf

DOI

10.1109/MWSYM.2002.1011874

Filename

1011874