Title :
Advanced control for nano-positioner driven by piezo actuator
Author :
Chen, Xinkai ; Su, Chun-Yi
Author_Institution :
Dept. of Electron. & Inf. Syst., Shibaura Inst. of Technol., Saitama, Japan
fDate :
Nov. 30 2010-Dec. 2 2010
Abstract :
The piezo-actuated stage is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated stage is a challenging task. This paper discusses the high precision adaptive control for the piezo-actuated stage, where the hysteresis is described by Prandtl-Ishlinskii model. Only the parameters which are directly needed in the controller design are estimated. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
Keywords :
adaptive control; control system synthesis; nanopositioning; piezoelectric actuators; stability; Prandtl-Ishlinskii model; adaptive control; advanced control; controller design; global stability; hysteretic nonlinearity; nanopositioner; piezo electric actuator; piezo-actuated stage; position error; positioning mechanism; Actuators; Adaptation model; Adaptive control; Force; Hysteresis; Mathematical model; Stability analysis; adaptive control; hysteresis; nano-positioner; piezo actuator;
Conference_Titel :
Computer Engineering and Systems (ICCES), 2010 International Conference on
Conference_Location :
Cairo
Print_ISBN :
978-1-4244-7040-2
DOI :
10.1109/ICCES.2010.5674837
