Title :
IEE Colloquium on `Measurement Using Resonant Sensing´ (Digest No.1993/237)
Abstract :
The following topics were dealt with: resonant pressure sensors; resonant sensors; CMOS compatible micromachined resonators; application of resonant gyros; and micromachined resonant gyros
Keywords :
CMOS integrated circuits; electric sensing devices; gyroscopes; micromechanical devices; pressure measurement; pressure sensors; resonators; CMOS compatible micromachined resonators; gyroscopes; micromachined resonant gyros; resonant pressure sensors;
Conference_Titel :
Measurement Using Resonant Sensing, IEE Colloquium on
Conference_Location :
London
